JPH0441923B2 - - Google Patents

Info

Publication number
JPH0441923B2
JPH0441923B2 JP10006786A JP10006786A JPH0441923B2 JP H0441923 B2 JPH0441923 B2 JP H0441923B2 JP 10006786 A JP10006786 A JP 10006786A JP 10006786 A JP10006786 A JP 10006786A JP H0441923 B2 JPH0441923 B2 JP H0441923B2
Authority
JP
Japan
Prior art keywords
rotating shaft
measured
rotation
film thickness
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10006786A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62255807A (ja
Inventor
Toshishige Nagao
Masayuki Ariki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP10006786A priority Critical patent/JPS62255807A/ja
Priority to KR1019870003914A priority patent/KR900003208B1/ko
Priority to CA000535948A priority patent/CA1292803C/en
Priority to US07/043,711 priority patent/US4748331A/en
Priority to DE8787106268T priority patent/DE3777232D1/de
Priority to EP87106268A priority patent/EP0243961B1/en
Publication of JPS62255807A publication Critical patent/JPS62255807A/ja
Publication of JPH0441923B2 publication Critical patent/JPH0441923B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP10006786A 1986-04-29 1986-04-29 膜厚測定装置 Granted JPS62255807A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP10006786A JPS62255807A (ja) 1986-04-29 1986-04-29 膜厚測定装置
KR1019870003914A KR900003208B1 (ko) 1986-04-29 1987-04-23 막(膜)두께의 측정장치
CA000535948A CA1292803C (en) 1986-04-29 1987-04-28 Film thickness measuring device
US07/043,711 US4748331A (en) 1986-04-29 1987-04-29 Film thickness measuring device with signal averaging to compensate for roller eccentricity
DE8787106268T DE3777232D1 (de) 1986-04-29 1987-04-29 Vorrichtung zum messen der schichtdicke.
EP87106268A EP0243961B1 (en) 1986-04-29 1987-04-29 Film thickness measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10006786A JPS62255807A (ja) 1986-04-29 1986-04-29 膜厚測定装置

Publications (2)

Publication Number Publication Date
JPS62255807A JPS62255807A (ja) 1987-11-07
JPH0441923B2 true JPH0441923B2 (en]) 1992-07-09

Family

ID=14264118

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10006786A Granted JPS62255807A (ja) 1986-04-29 1986-04-29 膜厚測定装置

Country Status (1)

Country Link
JP (1) JPS62255807A (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1313757C (en) * 1988-04-26 1993-02-23 Mitsubishi Denki Kabushiki Kaisha Method for measuring film thickness
CN110986801A (zh) * 2019-11-15 2020-04-10 富泰华精密电子（郑州）有限公司 检测装置、检测设备及检测方法

Also Published As

Publication number Publication date
JPS62255807A (ja) 1987-11-07

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